Category Archives: News

Cai & Wang have published one paper PMUT PHOTOACOUSTIC IMAGING IN VIVO in Microsystems & Nanoengineering !

J. Cai, Y. Wang, L. Lou, S. Zhang, Y. Gu, F. Gao and T.

Shao and Luo have published one paper “Low Loss Al0.7Sc0.3N Thin Film Acoustic Delay lines” in IEEE EDL !

S. Shao, Z. Luo, Y. Lu, A. Mazzalai, C. Tosi and T. Wu,

Shao and Luo have published one paper “Al0.78Sc0.22N Lamb Wave Contour Mode Resonators” in IEEE TUFFC !

Z. Luo, S. Shao and T. Wu, “Al0.78Sc0.22N Lamb Wa

Lu and Liu have published one paper “Dual-Axis MEMS Resonant Scanner Using 128°Y Lithium Niobate Thin-Film” in Acoustics !

Y. Lu, K. Liu, T. Wu, “Dual-Axis MEMS Resonant Scanner

Luo has published one paper “Al0.7Sc0.3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (kt2·Qm) over 146” in APL !

Z. Luo, S. Shao, K. Liu, Y. Lu, A. Mazzalai, C. Tosi, a

Shao and Luo have published one paper “High Figure-of-Merit Lamb Wave Resonators based on Al0.7Sc0.3N Thin Film” in IEEE EDL !

S. Shao, Z. Luo and T. Wu, “High Figure-of-Merit

SMALL & Prof. Ou Xin has published one paper in EDL !

J. Wu, S. Zhang, H. Zhou, P. Zheng, L. Zhang, Z. Li, Y.

Luo has published one paper in Microelectronic Engineering !

Z. Luo, S. Shao, T. Wu, “Characterization of ALN and AL

SMALL group have 3 papers accepted for IEEE MEMS 2021!

SMALL group Luo, Cai, Shao et al have following 3 paper

Openings Available

SMALL 招收2022级研究生、 博士后/研究员、工程师、访问学生/学者 Multiple openings

Dr. Wu and collaborators have published a paper in Microsystems & Nanoengineering!

Dr. Wu and collaborators have published one paper in Mi

Dr. Wu and collaborators have published a paper in Journal of Physical Chemistry !

Dr. Wu and collaborators have published one paper in Jo

微纳工艺实验2020春季班结束!

《压电微机电谐振器》一书正式出版!

由吴涛和李昕欣老师共同翻译的《压电微机电谐振器》一书正式出版! 本书主要介绍压电MEMS谐振器的各种制作材料、

Dr. Wu and collaborators have published a paper in IEEE ELECTRON DEVICE LETTERS!

Dr. Wu and collaborators have published one paper in IE

Dr. Wu and collaborators have published a paper in JMEMS !

Dr. Wu and collaborators Ming-Huang Li and Songbin Gong

Congratulation! Dr. Wu is awarded for Shanghai Natural Science Foundation Program 2019 !

Dr. Tao Wu and Dr. Xiong Wang have collaborated to get

Prof. Wu leads a new Undergraduate Course Reform Project funded by Shanghai Municipal Education Commission

经学校申报、专家评审和市教委审核,上海科技大学吴涛老师负责申报的《微纳加工与微机电系统的教学与实践》项目,获得

Welcome new members in SMALL !

Dr. YADAGIRI KARAMPURI joined SMALL in 2019/03. He earn

Dr. Wu and collaborators have presented 3 papers on IEEE MEMS 2019!

(a)芯片级微机电回转器结构图(b)回转器的高阶模态仿真 我校信息学院吴涛教授与UIUC Songbin Go