Category Archives: News

SMALL group have 4 papers accepted for IEEE MEMS 2025!

Congrats! Check the MEMS 2025 program for more details. […]

Prof. Wu and Collaborators have published one paper in Microsys. Nanoeng.

Zhang, Y., Jin, T., Deng, Y. et al. A low-voltage-drive […]

Class 2024 Graduation !

2 Bachelors, 1 Master and 1 PhD students have finished […]

课题组研究生李羕参加APCOT2024国际学术会议获“最佳论文二等奖”

2024年6月23日至26日,第11届亚太传感器与微纳技术大会(APCOT)在新加坡国立大学圆满落幕。上海科技 […]

Xu Xuankai and Du Mingye et al. have published papers in APL !

On-chip topological phononic crystal acoustic waveguide […]

Class 2023 Graduation !

4 Master and 3 PhD graduate students have finished thei […]

Shao et al. have published one paper “Electro-Acoustic Phase Modulator Based on AlScN Thin Film” in IEEE EDL !

We demonstrate an acoustic wave phase modulator based o […]

Cai & Wang et al. have published one paper of PAI using Broadened Bandwidth ALN PMUT in IEEE Sensors Letters !

“Photoacoustic Imaging Based on Broadened Bandwid […]

Wang Y.W. and Zhang L.J. et al. have published one paper of MITAI using AlScN PMUT in Appl. Phys. Lett. !

We have collabrated with Prof. Wang Xiong for the first […]

Liu K.F. et al. have published one paper “7.5 GHz Near-Zero Temperature Coefficient of Frequency Lithium Niobate Resonator” in IEEE EDL !

This work presents a low temperature coefficient of fre […]

Shao et al. have published one paper “Lorentz-force gyrator based on AlScN piezoelectric thin film” in Appl. Phys. Lett. !

Shao et al. have published one paper titled “Lore […]

微纳工艺实验课程2022秋季班结课!

       微纳工艺实验课,带你体验微纳加工全过程         微纳加工工艺水平与集成电路和微纳传感器芯 […]

SMALL group have 4 papers accepted for IEEE MEMS 2023!

SMALL group have following 4 papers accepted and presen […]

Openings Available

SMALL 招收2025级研究生、 博士后/研究员、工程师、访问学生/学者 Multiple openings […]

Cai & Wang have published one paper of “PMUT Photoacoustic Imaging In Vivo” in Microsystems & Nanoengineering !

J. Cai, Y. Wang, L. Lou, S. Zhang, Y. Gu, F. Gao and T. […]

Shao and Luo have published one paper “Low Loss Al0.7Sc0.3N Thin Film Acoustic Delay lines” in IEEE EDL !

S. Shao, Z. Luo, Y. Lu, A. Mazzalai, C. Tosi and T. Wu, […]

Shao and Luo have published one paper “Al0.78Sc0.22N Lamb Wave Contour Mode Resonators” in IEEE TUFFC !

Z. Luo, S. Shao and T. Wu, “Al0.78Sc0.22N Lamb Wa […]

Lu and Liu have published one paper “Dual-Axis MEMS Resonant Scanner Using 128°Y Lithium Niobate Thin-Film” in Acoustics !

Y. Lu, K. Liu, T. Wu, “Dual-Axis MEMS Resonant Scanner […]

Luo has published one paper “Al0.7Sc0.3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (kt2·Qm) over 146” in Appl. Phys. Lett. !

Z. Luo, S. Shao, K. Liu, Y. Lu, A. Mazzalai, C. Tosi, a […]

Shao and Luo have published one paper “High Figure-of-Merit Lamb Wave Resonators based on Al0.7Sc0.3N Thin Film” in IEEE EDL !

S. Shao, Z. Luo and T. Wu, “High Figure-of-Merit […]

SMALL & Prof. Ou Xin has published one paper in EDL !

J. Wu, S. Zhang, H. Zhou, P. Zheng, L. Zhang, Z. Li, Y. […]

Luo has published one paper in Microelectronic Engineering !

Z. Luo, S. Shao, T. Wu, “Characterization of ALN and AL […]

SMALL group have 3 papers accepted for IEEE MEMS 2021!

SMALL group Luo ZF, Cai JX, Shao Shuai et al have follo […]

Dr. Wu and collaborators have published a paper in Microsystems & Nanoengineering!

Dr. Wu and collaborators have published one paper in Mi […]

Dr. Wu and collaborators have published a paper in Journal of Physical Chemistry !

Dr. Wu and collaborators have published one paper in Jo […]

微纳工艺实验2020春季班结束!

《压电微机电谐振器》一书正式出版!

由吴涛和李昕欣老师共同翻译的《压电微机电谐振器》一书正式出版! 本书主要介绍压电MEMS谐振器的各种制作材料、 […]

Dr. Wu and collaborators have published a paper in IEEE ELECTRON DEVICE LETTERS!

Dr. Wu and collaborators have published one paper in IE […]

Dr. Wu and collaborators have published a paper in JMEMS !

Dr. Wu and collaborators Ming-Huang Li and Songbin Gong […]

Congratulation! Dr. Wu is awarded for Shanghai Natural Science Foundation Program 2019 !

Dr. Tao Wu and Dr. Xiong Wang have collaborated to get […]