Recent News

• Openings Available

  SMALL 招收2024级研究生、 博士后/研究员、工程师、访问学生/学者

  Multiple openings of 1) Master & PhD Graduate Students; 2) Postdoctoral Fellow or Research Professor, 3) Research Engineer, 4) Visiting Student/Scholar are currently available in SMALL. Candidates with microelectronics, electronic/electrical engineering, communication, mechanical engineering, and physics related background and strong interest in MEMS and Transducers are welcome to join. Please email your CV, Transcript and Personal Statement to Dr. Wu, and submit application from here.

  上科大微系统与先进传感器实验室现招收以下职位人员：1. 硕士/博士研究生；2. 博士后和研究员；3. 工程师；4. 访问学者/访问学生。实验室研究方向涉及多学科交叉, 申请人需具有微电子、电气、 通信、 机电和物理等相关学习/工作背景, 对声学多物理微纳传感器、超声/射频电路和集成电路方向感兴趣。

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• Prof. Wu and Collaborators have published one paper in Nano Letter

  We investigate an aluminum nitride (AlN)-silicon hybrid platform to enable AO modulation on silicon waveguides. The AO interaction is enhanced through a Fabry–Perot resonant cavity, achieving a π-phase shift voltage (V_π) of 27.8 V and a half-wave voltage-length product (V_πL) of 0.55 V·cm with a modulation length of 200 μm. We also demonstrate AO modulation under cryogenic conditions, where the device performance metrics improve to 16.5 V and 0.33 V·cm, respectively. Fabricated using complementary metal-oxide-semiconductor-compatible processes, this AlN-silicon device offers seamless integration with photonic and electronic components, underscoring its potential for next-generation photonic systems.

  https://pubs.acs.org/doi/10.1021/acs.nanolett.4c05680

  

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• Jiawei Li & Xu Xuankai et al. have published one paper in APL

  J.W. Li, X.K. Xu, Y. Li, T. Wu; “Electrically tunable GHz acoustic waveguide using Al0.7Sc0.3N thin film,”  Phys. Lett. 3 March 2025; 126 (9): 092201. https://doi.org/10.1063/5.0257586

  This Letter introduces an innovative electrically tunable suspended acoustic waveguide utilizing aluminum scandium nitride thin film. This design allows for dynamic modulation of the phase of traveling acoustic waves through the application of a vertical electric field. With both simulation and experimental approaches, the study explores how the waveguide width and inherent dispersion properties influence phase modulation. Results indicate that broader waveguides demonstrate more significant phase lag, with phase shifts of 37.2°, 40.8°, and 44.7° for waveguide widths of 10, 20, and 30 μm, respectively, measured in 200 μm-long segments under a ±40 V DC bias at 1.05 GHz. The exceptionally low V_π·L of 6.44 V·cm underscores the system’s ability to control phase efficiently with minimal power consumption.

  https://doi.org/10.1063/5.0257586

  

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• Xuankai Xu et al. have published one paper in IEEE JMEMS

  Xu, Y. Liu, T. Wu, “Bidirectional Thermo-Acoustic Modulator based on LiNbO₃ thin film,” Journal of Microelectromechanical Systems. doi: 10.1109/JMEMS.2024.3510540.

  

  
  

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• Prof. Wu and Collaborators have published one paper in Photonics Research

  Scandium-doped aluminum nitride (AlScN) with an asymmetric hexagonal wurtzite structure exhibits enhanced second-order nonlinear and piezoelectric properties compared to aluminum nitride (AlN), while maintaining a relatively large bandgap. It provides a promising platform for photonic circuits and facilitates the seamless integration of passive and active functional devices. Here, we present the design, fabrication, and characterization of AlScN electro-optic (EO) micro-ring modulators, introducing active functionalities to the chip-scale AlScN platform. These waveguide-integrated EO modulators utilize sputtered AlScN thin films as the light-guiding medium, with the entire fabrication process being compatible with complementary metal-oxide-semiconductor (CMOS) technology. We extract the in-device effective EO coefficient of 2.86 pm/V at 12 GHz. The devices show a minimum half-wave voltage-length product of 3.12 V·cm at a modulation frequency of 14 GHz, and achieve a 3-dB modulation bandwidth of approximately 22 GHz. Our work provides a promising modulation scheme for cost-effective silicon-integrated photonics systems.

  https://doi.org/10.1364/PRJ.539211

  

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• SMALL group have 4 papers accepted for IEEE MEMS 2025!

  Congrats!

  Check the MEMS 2025 program for more details.
  MEMS2025_Program

   

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• SMALL group have 8 papers published 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) !

  Congrats!

  1. X. Xu, Y. Liu, L. Jin, P. Wu, Y. Liao and T. Wu, “Thermo-acoustic Phase Modulator based on Y36-cut LiNbO3 Thin Film,” 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), Taipei, 2024, pp. 1-4, doi: 10.1109/UFFC-JS60046.2024.10793939.
  2. M. Du, Y. Wang and T. Wu, “Magnetic Field Control of Lithium Niobate Thin Film Acoustic Delay Lines,” 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), Taipei, 2024, pp. 1-4, doi: 10.1109/UFFC-JS60046.2024.10793886.
  3. J. Cai, M. Du and T. Wu, “Nonlinearity Analysis of Dual-electrode Piezoelectric Micromachined Ultrasonic Transducer,” 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), Taipei, 2024, pp. 1-4, doi: 10.1109/UFFC-JS60046.2024.10794070.
  4. W. Li, J. Li and T. Wu, “Low Loss Acoustic Waveguide Based On 128° Y-cut Lithium Niobate,” 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), Taipei, 2024, pp. 1-4, doi: 10.1109/UFFC-JS60046.2024.10793846.
  5. J. Li, L. Jin, M. Du, P. Wu, Y. Liao and T. Wu, “Wavelength-Scale Focusing Transducer Based on Suspended Aluminum Nitride Thin Film,” 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), Taipei, 2024, pp. 1-4, doi: 10.1109/UFFC-JS60046.2024.10793912.
  6. K. Du, F. Liu, X. Xu and T. Wu, “Characterization of AlN and AlScN thin films CPW Transmission on High-Resistive Substrates,” 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), Taipei, 2024, pp. 1-4, doi: 10.1109/UFFC-JS60046.2024.10793661.
  7. Y. Li, J. Li and T. Wu, “Low Loss Acoustic Waveguide Based on Aluminum Nitride Thin Film,” 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), Taipei, 2024, pp. 1-4, doi: 10.1109/UFFC-JS60046.2024.10794149.
  8. Y. Li and T. Wu, “A Comparative Study on Insertion Loss Spectrum of Acoustic Delay Lines,” 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), Taipei, 2024, pp. 1-4, doi: 10.1109/UFFC-JS60046.2024.10793961.

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• Prof. Wu and Collaborators have published one paper in Microsys. Nanoeng.

  Zhang, Y., Jin, T., Deng, Y. et al. A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging. Microsyst Nanoeng 10, 128 (2024). https://doi.org/10.1038/s41378-024-00755-9

  

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• Class 2024 Graduation !

  2 Bachelors, 1 Master and 1 PhD students have finished their defense ! Congrats !

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• 课题组研究生李羕参加APCOT2024国际学术会议获“最佳论文二等奖”

  2024年6月23日至26日，第11届亚太传感器与微纳技术大会（APCOT）在新加坡国立大学圆满落幕。上海科技大学信息学院吴涛课题组的研究成果”A Comparative Study on Insertion Loss Spectrum of Acoustic Delay Lines”荣获大会“最佳学生论文二等奖”。研究得到上海市自然科学基金和国家自然科学基金的支持。

  

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• Xu Xuankai and Du Mingye et al. have published papers in APL !

  On-chip topological phononic crystal acoustic waveguide based on lithium niobate thin films,   Appl. Phys. Lett. 124, 162203 (2024),  https://doi.org/10.1063/5.0190058

  Asymmetrical Lamb wave mode resonant infrared detector based on lithium niobate thin film,   Appl. Phys. Lett. 124, 192202 (2024),  https://doi.org/10.1063/5.0196015

  

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