Category Archives: Publications

SMALL group have 4 papers accepted for IEEE MEMS 2025!

Congrats! Check the MEMS 2025 program for more details. […]

Prof. Wu and Collaborators have published one paper in Microsys. Nanoeng.

Zhang, Y., Jin, T., Deng, Y. et al. A low-voltage-drive […]

课题组研究生李羕参加APCOT2024国际学术会议获“最佳论文二等奖”

2024年6月23日至26日,第11届亚太传感器与微纳技术大会(APCOT)在新加坡国立大学圆满落幕。上海科技 […]

Xu Xuankai and Du Mingye et al. have published papers in APL !

On-chip topological phononic crystal acoustic waveguide […]

Shao et al. have published one paper “Electro-Acoustic Phase Modulator Based on AlScN Thin Film” in IEEE EDL !

We demonstrate an acoustic wave phase modulator based o […]

Cai & Wang et al. have published one paper of PAI using Broadened Bandwidth ALN PMUT in IEEE Sensors Letters !

“Photoacoustic Imaging Based on Broadened Bandwid […]

Wang Y.W. and Zhang L.J. et al. have published one paper of MITAI using AlScN PMUT in Appl. Phys. Lett. !

We have collabrated with Prof. Wang Xiong for the first […]

Liu K.F. et al. have published one paper “7.5 GHz Near-Zero Temperature Coefficient of Frequency Lithium Niobate Resonator” in IEEE EDL !

This work presents a low temperature coefficient of fre […]

Shao et al. have published one paper “Lorentz-force gyrator based on AlScN piezoelectric thin film” in Appl. Phys. Lett. !

Shao et al. have published one paper titled “Lore […]

SMALL group have 4 papers accepted for IEEE MEMS 2023!

SMALL group have following 4 papers accepted and presen […]

Cai & Wang have published one paper of “PMUT Photoacoustic Imaging In Vivo” in Microsystems & Nanoengineering !

J. Cai, Y. Wang, L. Lou, S. Zhang, Y. Gu, F. Gao and T. […]

Shao and Luo have published one paper “Low Loss Al0.7Sc0.3N Thin Film Acoustic Delay lines” in IEEE EDL !

S. Shao, Z. Luo, Y. Lu, A. Mazzalai, C. Tosi and T. Wu, […]

Shao and Luo have published one paper “Al0.78Sc0.22N Lamb Wave Contour Mode Resonators” in IEEE TUFFC !

Z. Luo, S. Shao and T. Wu, “Al0.78Sc0.22N Lamb Wa […]

Lu and Liu have published one paper “Dual-Axis MEMS Resonant Scanner Using 128°Y Lithium Niobate Thin-Film” in Acoustics !

Y. Lu, K. Liu, T. Wu, “Dual-Axis MEMS Resonant Scanner […]

Luo has published one paper “Al0.7Sc0.3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (kt2·Qm) over 146” in Appl. Phys. Lett. !

Z. Luo, S. Shao, K. Liu, Y. Lu, A. Mazzalai, C. Tosi, a […]

Shao and Luo have published one paper “High Figure-of-Merit Lamb Wave Resonators based on Al0.7Sc0.3N Thin Film” in IEEE EDL !

S. Shao, Z. Luo and T. Wu, “High Figure-of-Merit […]

SMALL & Prof. Ou Xin has published one paper in EDL !

J. Wu, S. Zhang, H. Zhou, P. Zheng, L. Zhang, Z. Li, Y. […]

Luo has published one paper in Microelectronic Engineering !

Z. Luo, S. Shao, T. Wu, “Characterization of ALN and AL […]

Prof. Wu and collaborators have published one paper in IEEE Transactions on Biomedical Engineering !

J. Li , B. Wang , D. Zhang , C. Li , Y. Zhu , Y. Zou , […]

SMALL group have 3 papers accepted for IEEE MEMS 2021!

SMALL group Luo ZF, Cai JX, Shao Shuai et al have follo […]

Dr. Wu and collaborators have published a paper in Microsystems & Nanoengineering!

Dr. Wu and collaborators have published one paper in Mi […]

Dr. Wu and collaborators have published a paper in Journal of Physical Chemistry !

Dr. Wu and collaborators have published one paper in Jo […]

《压电微机电谐振器》一书正式出版!

由吴涛和李昕欣老师共同翻译的《压电微机电谐振器》一书正式出版! 本书主要介绍压电MEMS谐振器的各种制作材料、 […]

Dr. Wu and collaborators have published a paper in IEEE ELECTRON DEVICE LETTERS!

Dr. Wu and collaborators have published one paper in IE […]

Dr. Wu and collaborators have published a paper in JMEMS !

Dr. Wu and collaborators Ming-Huang Li and Songbin Gong […]

Dr. Wu and collaborators have published a review paper in MRS Bulletin!

图. (a-e)薄膜椭圆中多种能量的影响(f-g)利用特定切向的PMN-PT实现的磁畴控制(h)利用两组电极实 […]

2 Papers accepted for presentation at IEEE MEMS 2018 Conference

The 2 papers have been accepted for presentation at IEE […]

We present our work in 2017 IEEE SENSORS Conference!

Dr. Tao Wu attended and present work titled “Desi […]

Aluminum Nitride RF MEMS

Aluminum Nitride (AlN) piezoelectric NEMS resonant devi […]

Tessellated Silicon-Structures for Monocentric Imagers

Compared with conventional planar optical image sensors […]