Category Archives: Publications

Cai & Wang have published one paper PMUT PHOTOACOUSTIC IMAGING IN VIVO in Microsystems & Nanoengineering !

J. Cai, Y. Wang, L. Lou, S. Zhang, Y. Gu, F. Gao and T.

Shao and Luo have published one paper “Low Loss Al0.7Sc0.3N Thin Film Acoustic Delay lines” in IEEE EDL !

S. Shao, Z. Luo, Y. Lu, A. Mazzalai, C. Tosi and T. Wu,

Shao and Luo have published one paper “Al0.78Sc0.22N Lamb Wave Contour Mode Resonators” in IEEE TUFFC !

Z. Luo, S. Shao and T. Wu, “Al0.78Sc0.22N Lamb Wa

Lu and Liu have published one paper “Dual-Axis MEMS Resonant Scanner Using 128°Y Lithium Niobate Thin-Film” in Acoustics !

Y. Lu, K. Liu, T. Wu, “Dual-Axis MEMS Resonant Scanner

Luo has published one paper “Al0.7Sc0.3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (kt2·Qm) over 146” in APL !

Z. Luo, S. Shao, K. Liu, Y. Lu, A. Mazzalai, C. Tosi, a

Shao and Luo have published one paper “High Figure-of-Merit Lamb Wave Resonators based on Al0.7Sc0.3N Thin Film” in IEEE EDL !

S. Shao, Z. Luo and T. Wu, “High Figure-of-Merit

SMALL & Prof. Ou Xin has published one paper in EDL !

J. Wu, S. Zhang, H. Zhou, P. Zheng, L. Zhang, Z. Li, Y.

Luo has published one paper in Microelectronic Engineering !

Z. Luo, S. Shao, T. Wu, “Characterization of ALN and AL

Prof. Wu and collaborators have published one paper in IEEE Transactions on Biomedical Engineering !

J. Li , B. Wang , D. Zhang , C. Li , Y. Zhu , Y. Zou ,

SMALL group have 3 papers accepted for IEEE MEMS 2021!

SMALL group Luo, Cai, Shao et al have following 3 paper

Dr. Wu and collaborators have published a paper in Microsystems & Nanoengineering!

Dr. Wu and collaborators have published one paper in Mi

Dr. Wu and collaborators have published a paper in Journal of Physical Chemistry !

Dr. Wu and collaborators have published one paper in Jo

《压电微机电谐振器》一书正式出版!

由吴涛和李昕欣老师共同翻译的《压电微机电谐振器》一书正式出版! 本书主要介绍压电MEMS谐振器的各种制作材料、

Dr. Wu and collaborators have published a paper in IEEE ELECTRON DEVICE LETTERS!

Dr. Wu and collaborators have published one paper in IE

Dr. Wu and collaborators have published a paper in JMEMS !

Dr. Wu and collaborators Ming-Huang Li and Songbin Gong

Dr. Wu and collaborators have published a review paper in MRS Bulletin!

图. (a-e)薄膜椭圆中多种能量的影响(f-g)利用特定切向的PMN-PT实现的磁畴控制(h)利用两组电极实

2 Papers accepted for presentation at IEEE MEMS 2018 Conference

The 2 papers have been accepted for presentation at IEE

We present our work in 2017 IEEE SENSORS Conference!

Dr. Tao Wu attended and present work titled “Desi

Aluminum Nitride RF MEMS

Aluminum Nitride (AlN) piezoelectric NEMS resonant devi

Tessellated Silicon-Structures for Monocentric Imagers

Compared with conventional planar optical image sensors