We demonstrate an acoustic wave phase modulator based on AlScN thin film. The acoustic wave phase of AlScN thin film devices can be controlled through the driving voltage, modulation length as well as the acoustic wavelength. A π phase shift is obtained at an amplitude of 62.5 V DC bias on an acoustic waveguide of 100 μm long at the acoustic wave of approximately 1.975 GHz, i.e., Vπ⋅L = 6.25e−3 V⋅m.  Such high performance AlScN thin film EA phase modulator proves a new PnIC platform for future hybrid chip-scale phonon transduction and signal processing.

Congrats! DOI: 10.1109/LED.2023.3259440