Tag Archives: Research_AlN

Shao and Luo have published one paper “Low Loss Al0.7Sc0.3N Thin Film Acoustic Delay lines” in IEEE EDL !

S. Shao, Z. Luo, Y. Lu, A. Mazzalai, C. Tosi and T. Wu,

Shao and Luo have published one paper “Al0.78Sc0.22N Lamb Wave Contour Mode Resonators” in IEEE TUFFC !

Z. Luo, S. Shao and T. Wu, “Al0.78Sc0.22N Lamb Wa

Luo has published one paper “Al0.7Sc0.3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (kt2·Qm) over 146” in APL !

Z. Luo, S. Shao, K. Liu, Y. Lu, A. Mazzalai, C. Tosi, a

Shao and Luo have published one paper “High Figure-of-Merit Lamb Wave Resonators based on Al0.7Sc0.3N Thin Film” in IEEE EDL !

S. Shao, Z. Luo and T. Wu, “High Figure-of-Merit

Luo has published one paper in Microelectronic Engineering !

Z. Luo, S. Shao, T. Wu, “Characterization of ALN and AL

Dr. Wu and collaborators have published a paper in Microsystems & Nanoengineering!

Dr. Wu and collaborators have published one paper in Mi

Dr. Wu and collaborators have published a paper in IEEE ELECTRON DEVICE LETTERS!

Dr. Wu and collaborators have published one paper in IE

Aluminum Nitride RF MEMS

Aluminum Nitride (AlN) piezoelectric NEMS resonant devi