Dr. Wu and collaborators Ming-Huang Li and Songbin Gong et al have published one paper in JMEMS titled of “Temperature Stability Analysis of Thin-Film Lithium Niobate SH0 Plate Wave Resonators”.

DOI: 10.1109/JMEMS.2019.2934126

This paper presents an extensive study on the temperature coefficient of frequency (TCF) for Y36 cut thin-film lithium niobate (LiNbO3) resonators.

FEM-simulated dispersive characteristics of the 1st-order TCFs for the SH0 plate wave resonators on the LiNbO3/SiO2 thin film with various surface boundary conditions: (a) Free-surface and open-circuited. (b) Freesurface and short-circuited. (c) Metal-loaded surface and short-circuited.

(a) Cross-sectional view of the piezoelectric MEMS resonator for equivalent TCF mapping. (b) Hypothesis for the complex TCF behavior at the Region (III).

SH0 mode higher lateral-order resonators for TCF model verification: (a) 3-electrode resonator for even-order overtones. (b) 2-electrode resonator array for odd-order overtones. The array design is applied to the 2-electrode resonator for enhancing the output signal.