Some University MEMS Groups:

• Berkeley Sensors and Actuators Center: http://www-bsac.eecs.berkeley.edu/
• Standford Prof. Roger T. Howe group:  http://web.stanford.edu/group/howe/
• Standford Prof. Thomas Kenny group:   https://micromachine.stanford.edu/
• CMU Gianluca Piazza group: https://users.ece.cmu.edu/~piazza/
• UIUC Prof. Songbin Gong group: http://ilirm.ece.illinois.edu/
• Northeastern Prof. Matteo Rinaldi group: https://web.northeastern.edu/nemslab/

The National Nanotechnology Coordinated Infrastructure Sites (NNCI, formerly NNIN) :

• Center for Nanoscale Systems (CNS)
• Cornell Nanoscale Science and Technology Facility (CNF)
• NANO@Stanford
• All sites https://www.nnci.net/sites/view-all