Recent News

• Openings Available

  SMALL 招收2024级研究生、 博士后/研究员、工程师、访问学生/学者

  Multiple openings of 1) Master & PhD Graduate Students; 2) Postdoctoral Fellow or Research Professor, 3) Research Engineer, 4) Visiting Student/Scholar are currently available in SMALL. Candidates with microelectronics, electronic/electrical engineering, communication, mechanical engineering, and physics related background and strong interest in MEMS and Transducers are welcome to join. Please email your CV, Transcript and Personal Statement to Dr. Wu, and submit application from here.

  上科大微系统与先进传感器实验室现招收以下职位人员：1. 硕士/博士研究生；2. 博士后和研究员；3. 工程师；4. 访问学者/访问学生。实验室研究方向涉及多学科交叉, 申请人需具有微电子、电气、 通信、 机电和物理等相关学习/工作背景, 对声学多物理微纳传感器、超声/射频电路和集成电路方向感兴趣。

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• Class 2023 Graduation !

  4 Master and 3 PhD graduate students have finished their defense ! Congrats !

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• Shao et al. have published one paper “Electro-Acoustic Phase Modulator Based on AlScN Thin Film” in IEEE EDL !

  We demonstrate an acoustic wave phase modulator based on AlScN thin film. The acoustic wave phase of AlScN thin film devices can be controlled through the driving voltage, modulation length as well as the acoustic wavelength. A π phase shift is obtained at an amplitude of 62.5 V DC bias on an acoustic waveguide of 100 μm long at the acoustic wave of approximately 1.975 GHz, i.e., Vπ⋅L = 6.25e−3 V⋅m.  Such high performance AlScN thin film EA phase modulator proves a new PnIC platform for future hybrid chip-scale phonon transduction and signal processing.

  Congrats! DOI: 10.1109/LED.2023.3259440

  

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• Cai & Wang et al. have published one paper of PAI using Broadened Bandwidth ALN PMUT in IEEE Sensors Letters !

  “Photoacoustic Imaging Based on Broadened Bandwidth Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers,” in IEEE Sensors Letters. Congrats! 

  doi: 10.1109/LSENS.2023.3254593.

  

  

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• Wang Y.W. and Zhang L.J. et al. have published one paper of MITAI using AlScN PMUT in Appl. Phys. Lett. !

  We have collabrated with Prof. Wang Xiong for the first demonstration of PMUT on Microwave-induced Thermoacoustic Imaging (MITAI). Our AlScN PMUT device was characterized and experimented to show that it could significantly improve the imaging of the biological sample, decreasing the mean square error by up to 72%, which benefits from a 2.96 times larger detection angle of thermoacoustic signals compared to commercial ultrasonic transducers. The miniaturized and high-performance PMUT devices have the potential to be applied to clinical or personal diagnosis and monitoring equipment.

  Congrats! Check our story on Appl. Phys. Lett. !  https://doi.org/10.1063/5.0140069

  

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• Liu K.F. et al. have published one paper “7.5 GHz Near-Zero Temperature Coefficient of Frequency Lithium Niobate Resonator” in IEEE EDL !

  This work presents a low temperature coefficient of frequency (TCF) and high-performance S4 mode acoustic resonator based on 128∘Y LiNbO3/SiO2/a-Si/Si (trap-rich layer assisted LiNbO3-on-insulator, TR-LNOI) substrate. The electromechanical coupling, quality factor, and TCF are optimized for S4 mode by adjusting the thickness ratio of stack layers and the geometry design of the inter-digital transducer. The optimized resonators exhibit a TCF of resonant frequency as low as 0.24 ppm/K, an electromechanical coupling ( k2 ) of 14.8%, a maximum quality factor ( Qmax ) of 1406 at 7.43 GHz, resulting a k2⋅Qmax of 208.

  Congrats! Check IEEE EDL for more details! https://doi.org/10.1109/LED.2022.3230911

  

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• Shao et al. have published one paper “Lorentz-force gyrator based on AlScN piezoelectric thin film” in Appl. Phys. Lett. !

  Shao et al. have published one paper titled “Lorentz-force gyrator based on AlScN piezoelectric thin film” in Appl. Phys. Lett. !

  doi:10.1063/5.0122325

  

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• 微纳工艺实验课程2022秋季班结课！

         微纳工艺实验课，带你体验微纳加工全过程

          微纳加工工艺水平与集成电路和微纳传感器芯片制造等关键领域息息相关。为对接国家重大战略需求和探索高水平、创新型研究生培养体系，上海科技大学信息科学与技术学院吴涛教授联合上海科技大学量子器件中心开设了“微纳加工工艺实验”的本研一体课程，旨在让学生通过芯片设计、版图绘制、工艺实训等环节，使学生系统了解并掌握微电子芯片的开发和微纳加工制造全流程，将理论和实践更好的结合。

  

  图：2022秋课程合影

         2019级本科生田川介绍，“虽然理论课需要记忆的内容比较多，但通过实验室中的实践操作，我做到了理论与实践相互印证。”

         课程设计主要通过讲解、培训及引导实践三个环节来进行。任课老师和量子器件中心工程师首先会全面讲解材料与器件基础、以及光刻、镀膜、刻蚀、量测等微纳工艺基础知识；在此基础上，工艺工程师会分别就仪器的工作原理及使用进行培训，使同学们掌握每个工艺模块和相关仪器的具体操作；最后在助教的带领下进行不同短流程工艺和实验课程项目进行流片。

         “在课程中，我们不仅跟随课堂完成了微纳工艺设备的学习，同时也对于光刻与金属剥离的工艺环节进行了实验设计。” 2019级本科生倪浩睿表示，“在与同学老师的讨论中，我将理论与实验相结合，对微纳工艺有了更加深刻的理解，为未来从事微纳器件领域的学习与科研打下了坚实的基础。”

         check more on

  https://sist.shanghaitech.edu.cn/2023/0203/c2858a1073984/page.htm

  https://www.shanghaitech.edu.cn/2023/0203/c1001a1073964/page.htm

   

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• SMALL group have 4 papers accepted for IEEE MEMS 2023!

  SMALL group have following 4 papers accepted and presented in IEEE MEMS 2023 in Germany. Congratulations !

  LNOI THIN-FILM DUAL-AXIS RESONANT MICRO-MIRROR WITH E16 TORSIONAL ACTUATION

  ULTRA-WIDEBAND MEMS FILTERS USING LOCALIZED THINNED 128° Y-CUT THIN-FILM LITHIUM NIOBATE

  MICROWAVE-INDUCED THERMOACOUSTIC IMAGING USING ALUMINUM NITRIDE PMUT

  NON-INVASIVE CAROTID ARTERY MONITORING BY USING ALUMINUM NITRIDE PMUT CLOSE-PACKED ARRAYS

   

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• Openings Available

  SMALL 招收研究生、 博士后/研究员、工程师、访问学生/学者

  上科大微系统与先进传感器实验室(SMALL)致力于研发微纳机电系统与器件，科研方向包括但不限于在MEMS多物理耦合换能器，压电声学器件、先进微纳工艺以及微系统集成电路。课题组依托上科一流实验条件，开展多项微纳器件和传感系统相关的前沿课题，我们欢迎理工科相关专业背景的同学加入。

  SMALL 需要什么样的候选人

  1) 对微纳机电系统及相关领域感兴趣！愿意在上科大直博或赴国外一流大学继续深造优先。

  2) 专业背景：电气/电子、微电子、信息/通信、机电、物理等相关专业，基础扎实。

  3) 外语水平：良好的英文文献阅读与写作能力。

  SMALL 申请方式

  请了解课题组科研方向，从网盘link（提取码：piwc）中选取并研读1-2篇文章，总结文章内容并提出你的见解和感兴趣的科研课题，请将你的简历、成绩单、个人陈述和文章总结PPT一起发到吴涛博士邮箱。

   

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