Recent News

• Openings Available

  SMALL 招收2022级研究生、 博士后/研究员、工程师、访问学生/学者

  Multiple openings of 1) Master & PhD Graduate Students; 2) Postdoctoral Fellow or Research Professor, 3) Research Engineer, 4) Visiting Student/Scholar are currently available in SMALL. Candidates with microelectronics, electronic/electrical engineering, communication, mechanical engineering, and physics related background and strong interest in MEMS and Transducers are welcome to join. Please email your CV, Transcript and Personal Statement to Dr. Wu, and submit application from here.

  上科大微系统与先进传感器实验室现招收以下职位人员：1. 硕士/博士研究生；2. 博士后和研究员；3. 工程师；4. 访问学者/访问学生。实验室研究方向涉及多学科交叉, 申请人需具有微电子、电气、 通信、 机电和物理等相关学习工作背景, 对声学多物理场微纳传感器和集成电路方向感兴趣。

  Read More »

• Cai & Wang have published one paper PMUT PHOTOACOUSTIC IMAGING IN VIVO in Microsystems & Nanoengineering !

  J. Cai, Y. Wang, L. Lou, S. Zhang, Y. Gu, F. Gao and T. Wu, “BEYOND FUNDAMENTAL RESONANCE MODE: HIGH-ORDER MULTI-BAND ALN PMUT FOR PHOTOACOUSTIC IMAGING IN VIVO”, Microsystems & Nanoengineering, Accepted

  

  Read More »

• Shao and Luo have published one paper “Low Loss Al0.7Sc0.3N Thin Film Acoustic Delay lines” in IEEE EDL !

  S. Shao, Z. Luo, Y. Lu, A. Mazzalai, C. Tosi and T. Wu, “Low Loss Al0.7Sc0.3N Thin Film Acoustic Delay lines,” in IEEE Electron Device Letters, vol. 43, no. 4, pp. 647-650, April 2022, doi: 10.1109/LED.2022.3152908.

  

  Read More »

• Shao and Luo have published one paper “Al0.78Sc0.22N Lamb Wave Contour Mode Resonators” in IEEE TUFFC !

  Z. Luo, S. Shao and T. Wu, “Al0.78Sc0.22N Lamb Wave Contour Mode Resonators,” in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, doi: 10.1109/TUFFC.2021.3136337.

  

  Read More »

• Lu and Liu have published one paper “Dual-Axis MEMS Resonant Scanner Using 128°Y Lithium Niobate Thin-Film” in Acoustics !

  Y. Lu, K. Liu, T. Wu, “Dual-Axis MEMS Resonant Scanner Using 128°Y Lithium Niobate Thin-Film”. Acoustics, 4(2), 313-328, 2022. doi:10.3390/acoustics4020019.

  

  Read More »

• Luo has published one paper “Al0.7Sc0.3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (kt2·Qm) over 146” in APL !

  Z. Luo, S. Shao, K. Liu, Y. Lu, A. Mazzalai, C. Tosi, and T. Wu, “Al_0.7Sc_0.3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (k_t²·Q_m) over 146“, Appl. Phys. Lett. 120, 173508, 2022, doi:10.1063/5.0090226.

  Read More »

• Shao and Luo have published one paper “High Figure-of-Merit Lamb Wave Resonators based on Al0.7Sc0.3N Thin Film” in IEEE EDL !

  S. Shao, Z. Luo and T. Wu, “High Figure-of-Merit Lamb Wave Resonators based on Al0.7Sc0.3N Thin Film,” in IEEE Electron Device Letters, vol. 42, no. 9, pp. 1378-1381, Sep. 2021, doi: 10.1109/LED.2021.3100036.

  

  Read More »

• SMALL & Prof. Ou Xin has published one paper in EDL !

  J. Wu, S. Zhang, H. Zhou, P. Zheng, L. Zhang, Z. Li, Y. Wang, T. You, K. Huang, T. Wu, and X. Ou, “A New Class of High-Overtone Bulk Acoustic Resonators Using Lithium Niobate on Conductive Silicon Carbide,” in IEEE Electron Device Letters, vol. 42, no. 7, pp. 1061-1064, July 2021, doi: 10.1109/LED.2021.3079436.

  Read More »

• Luo has published one paper in Microelectronic Engineering !

  Z. Luo, S. Shao, T. Wu, “Characterization of ALN and ALSCN film ICP etching for micro/nano fabrication”, Microelectronic Engineering, 111530, 2021,

  DOI:10.1016/j.mee.2021.111530.

  

   

  Read More »

• Prof. Wu and collaborators have published one paper in IEEE Transactions on Biomedical Engineering !

  J. Li , B. Wang , D. Zhang , C. Li , Y. Zhu , Y. Zou , B. Chen , T. Wu , X. Wang, “A Preclinical System Prototype for Focused Microwave Breast Hyperthermia Guided by Compressive Thermoacoustic Tomography”, IEEE Transactions on Biomedical Engineering, DOI: 10.1109/TBME.2021.3059869

  Congratulations !

  

  Read More »

• SMALL group have 3 papers accepted for IEEE MEMS 2021!

  SMALL group Luo, Cai, Shao et al have following 3 papers accepted and to be present in IEEE MEMS 2021. Congratulations !

  1. “OPTIMIZATION OF AlN AND AlScN FILM ICP ETCHING”

  2. “INCREASING RANGING ACCURACY OF ALUMINUM NITRIDE PMUTS BY CIRCUIT COUPLING”

  3. “WIDE BANDWIDTH LORENTZ-FORCE MAGNETOMETER BASED ON LATERAL OVERTONE BULK ACOUSTIC RESONATOR”

  https://www.mems21.org/

   

  Read More »