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03/06/2021   Journal, News, Publications

Luo has published one paper in Microelectronic Engineering !

Z. Luo, S. Shao, T. Wu, “Characterization of ALN and ALSCN film ICP etching for micro/nano fabrication”, Microelectronic Engineering, 111530, 2021,

DOI:10.1016/j.mee.2021.111530.

 

Research_AlN
  • Welcome to join us!

    There are multiple openings of 1) graduate students (PhD or master), 2) postdoctoral fellow, 3) visiting scholar/student in SMALL. We welcomes people with science and engineering background to join SMALL to explore micro/nano-technologies. Competitive salary and subsidy will be provided.

    上海科技大学微系统与先进传感器实验室现招收以下职位人员:1. 硕士/博士研究生,  2. 博士后,3. 访问学者/学生。实验室研究方向涉及多学科交叉, 申请人需具有电子, 机械, 物理, 材料等相关学习工作背景, 对微纳加工和微纳传感器方向感兴趣。学校、学院和实验室将提供有竞争力的津贴/工作薪酬。

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