We have collabrated with Prof. Wang Xiong for the first demonstration of PMUT on Microwave-induced Thermoacoustic Imaging (MITAI). Our AlScN PMUT device was characterized and experimented to show that it could significantly improve the imaging of the biological sample, decreasing the mean square error by up to 72%, which benefits from a 2.96 times larger detection angle of thermoacoustic signals compared to commercial ultrasonic transducers. The miniaturized and high-performance PMUT devices have the potential to be applied to clinical or personal diagnosis and monitoring equipment.

Congrats! Check our story on Appl. Phys. Lett. !  https://doi.org/10.1063/5.0140069