Shao and Luo have published one paper “Low Loss Al0.7Sc0.3N Thin Film Acoustic Delay lines” in IEEE EDL !

S. Shao, Z. Luo, Y. Lu, A. Mazzalai, C. Tosi and T. Wu, […]

Shao and Luo have published one paper “Al0.78Sc0.22N Lamb Wave Contour Mode Resonators” in IEEE TUFFC !

Z. Luo, S. Shao and T. Wu, “Al0.78Sc0.22N Lamb Wa […]

Lu and Liu have published one paper “Dual-Axis MEMS Resonant Scanner Using 128°Y Lithium Niobate Thin-Film” in Acoustics !

Y. Lu, K. Liu, T. Wu, “Dual-Axis MEMS Resonant Scanner […]

Luo has published one paper “Al0.7Sc0.3N butterfly-shaped laterally vibrating resonator with a figure-of-merit (kt2·Qm) over 146” in Appl. Phys. Lett. !

Z. Luo, S. Shao, K. Liu, Y. Lu, A. Mazzalai, C. Tosi, a […]

Shao and Luo have published one paper “High Figure-of-Merit Lamb Wave Resonators based on Al0.7Sc0.3N Thin Film” in IEEE EDL !

S. Shao, Z. Luo and T. Wu, “High Figure-of-Merit […]

SMALL & Prof. Ou Xin has published one paper in EDL !

J. Wu, S. Zhang, H. Zhou, P. Zheng, L. Zhang, Z. Li, Y. […]

Luo has published one paper in Microelectronic Engineering !

Z. Luo, S. Shao, T. Wu, “Characterization of ALN and AL […]

Prof. Wu and collaborators have published one paper in IEEE Transactions on Biomedical Engineering !

J. Li , B. Wang , D. Zhang , C. Li , Y. Zhu , Y. Zou , […]

SMALL group have 3 papers accepted for IEEE MEMS 2021!

SMALL group Luo, Cai, Shao et al have following 3 paper […]

Dr. Wu and collaborators have published a paper in Microsystems & Nanoengineering!

Dr. Wu and collaborators have published one paper in Mi […]

Dr. Wu and collaborators have published a paper in Journal of Physical Chemistry !

Dr. Wu and collaborators have published one paper in Jo […]

微纳工艺实验2020春季班结束!

《压电微机电谐振器》一书正式出版!

由吴涛和李昕欣老师共同翻译的《压电微机电谐振器》一书正式出版! 本书主要介绍压电MEMS谐振器的各种制作材料、 […]

Dr. Wu and collaborators have published a paper in IEEE ELECTRON DEVICE LETTERS!

Dr. Wu and collaborators have published one paper in IE […]

Dr. Wu and collaborators have published a paper in JMEMS !

Dr. Wu and collaborators Ming-Huang Li and Songbin Gong […]

Congratulation! Dr. Wu is awarded for Shanghai Natural Science Foundation Program 2019 !

Dr. Tao Wu and Dr. Xiong Wang have collaborated to get […]

2019 Spring EE224L Photo Album

Prof. Wu leads a new Undergraduate Course Reform Project funded by Shanghai Municipal Education Commission

经学校申报、专家评审和市教委审核,上海科技大学吴涛老师负责申报的《微纳加工与微机电系统的教学与实践》项目,获得 […]

Welcome new members in SMALL !

Dr. YADAGIRI KARAMPURI joined SMALL in 2019/03. He earn […]

Dr. Wu and collaborators have presented 3 papers on IEEE MEMS 2019!

(a)芯片级微机电回转器结构图(b)回转器的高阶模态仿真 我校信息学院吴涛教授与UIUC Songbin Go […]

Dr. Wu and collaborators have published a review paper in MRS Bulletin!

图. (a-e)薄膜椭圆中多种能量的影响(f-g)利用特定切向的PMN-PT实现的磁畴控制(h)利用两组电极实 […]

Congratulation! Dr. Wu is awarded for NSFC 2018 !

Dr. Tao Wu and Dr. Xiong Wang have collaborated to get […]

中国 MEMS 产业发展趋势分析及建议

转载 SIMIT战略研究室  中国科学院上海微系统与信息技术研究所

Prof. Wu has finished visiting UIUC ILIRM Group

Dr. Wu is visiting UIUC ILIRM Group

Dr. Wu is visiting UIUC Prof. Songbin Gong’s Illi […]

2 Papers accepted for presentation at IEEE MEMS 2018 Conference

The 2 papers have been accepted for presentation at IEE […]

We present our work in 2017 IEEE SENSORS Conference!

Dr. Tao Wu attended and present work titled “Desi […]

Aluminum Nitride RF MEMS

Aluminum Nitride (AlN) piezoelectric NEMS resonant devi […]

Tessellated Silicon-Structures for Monocentric Imagers

Compared with conventional planar optical image sensors […]

Magnetic Nano-Ring and Single Domain

We have patterned magnetic nano-ring and single domain […]