SMALL
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Recent News
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Openings Available
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SMALL group have 4 papers accepted for IEEE MEMS 2025!
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Prof. Wu and Collaborators have published one paper in Microsys. Nanoeng.
Zhang, Y., Jin, T., Deng, Y. et al. A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging. Microsyst Nanoeng 10, 128 (2024). https://doi.org/10.1038/s41378-024-00755-9
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Class 2024 Graduation !
2 Bachelors, 1 Master and 1 PhD students have finished their defense ! Congrats !
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课题组研究生李羕参加APCOT2024国际学术会议获“最佳论文二等奖”
2024年6月23日至26日，第11届亚太传感器与微纳技术大会（APCOT）在新加坡国立大学圆满落幕。上海科技大学信息学院吴涛课题组的研究成果”A Comparative Study on Insertion Loss Spectrum of Acoustic Delay Lines”荣获大会“最佳学生论文二等奖”。研究得到上海市自然科学基金和国家自然科学基金的支持。
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Xu Xuankai and Du Mingye et al. have published papers in APL !
On-chip topological phononic crystal acoustic waveguide based on lithium niobate thin films, Appl. Phys. Lett. 124, 162203 (2024), https://doi.org/10.1063/5.0190058
Asymmetrical Lamb wave mode resonant infrared detector based on lithium niobate thin film, Appl. Phys. Lett. 124, 192202 (2024), https://doi.org/10.1063/5.0196015
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Class 2023 Graduation !
4 Master and 3 PhD graduate students have finished their defense ! Congrats !
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Shao et al. have published one paper “Electro-Acoustic Phase Modulator Based on AlScN Thin Film” in IEEE EDL !
We demonstrate an acoustic wave phase modulator based on AlScN thin film. The acoustic wave phase of AlScN thin film devices can be controlled through the driving voltage, modulation length as well as the acoustic wavelength. A π phase shift is obtained at an amplitude of 62.5 V DC bias on an acoustic waveguide of 100 μm long at the acoustic wave of approximately 1.975 GHz, i.e., Vπ⋅L = 6.25e−3 V⋅m. Such high performance AlScN thin film EA phase modulator proves a new PnIC platform for future hybrid chip-scale phonon transduction and signal processing.Congrats! DOI: 10.1109/LED.2023.3259440
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Cai & Wang et al. have published one paper of PAI using Broadened Bandwidth ALN PMUT in IEEE Sensors Letters !
“Photoacoustic Imaging Based on Broadened Bandwidth Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducers,” in IEEE Sensors Letters. Congrats!
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Wang Y.W. and Zhang L.J. et al. have published one paper of MITAI using AlScN PMUT in Appl. Phys. Lett. !
We have collabrated with Prof. Wang Xiong for the first demonstration of PMUT on Microwave-induced Thermoacoustic Imaging (MITAI). Our AlScN PMUT device was characterized and experimented to show that it could significantly improve the imaging of the biological sample, decreasing the mean square error by up to 72%, which benefits from a 2.96 times larger detection angle of thermoacoustic signals compared to commercial ultrasonic transducers. The miniaturized and high-performance PMUT devices have the potential to be applied to clinical or personal diagnosis and monitoring equipment.
Congrats! Check our story on Appl. Phys. Lett. ! https://doi.org/10.1063/5.0140069
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Liu K.F. et al. have published one paper “7.5 GHz Near-Zero Temperature Coefficient of Frequency Lithium Niobate Resonator” in IEEE EDL !
This work presents a low temperature coefficient of frequency (TCF) and high-performance S4 mode acoustic resonator based on 128∘Y LiNbO3/SiO2/a-Si/Si (trap-rich layer assisted LiNbO3-on-insulator, TR-LNOI) substrate. The electromechanical coupling, quality factor, and TCF are optimized for S4 mode by adjusting the thickness ratio of stack layers and the geometry design of the inter-digital transducer. The optimized resonators exhibit a TCF of resonant frequency as low as 0.24 ppm/K, an electromechanical coupling ( k2 ) of 14.8%, a maximum quality factor ( Qmax ) of 1406 at 7.43 GHz, resulting a k2⋅Qmax of 208.
Congrats! Check IEEE EDL for more details! https://doi.org/10.1109/LED.2022.3230911
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