Category Archives: Journal
Atomic layer deposition of Pb(Zr,Ti)Ox on 4H-SiC for metal-ferroelectric-insulator-semiconductor diodes
Atomic layer deposited (ALD) Pb(Zr,Ti)Ox (PZT) ultra-th […]
Atomic layer deposited (ALD) Pb(Zr,Ti)Ox (PZT) ultra-th […]