Category Archives: Journal

Atomic layer deposition of Pb(Zr,Ti)Ox on 4H-SiC for metal-ferroelectric-insulator-semiconductor diodes

Atomic layer deposited (ALD) Pb(Zr,Ti)Ox (PZT) ultra-th […]

Journal

F. Huang, M. Du, C. Ma, X. He, F. Suo, J. Li, T. Wu, N. […]