SMALL group have 3 papers accepted for IEEE MEMS 2021!

SMALL group Luo, Cai, Shao et al have following 3 papers accepted and to be present in IEEE MEMS 2021. Congratulations !

1. “OPTIMIZATION OF AlN AND AlScN FILM ICP ETCHING”

2. “INCREASING RANGING ACCURACY OF ALUMINUM NITRIDE PMUTS BY CIRCUIT COUPLING”

3. “WIDE BANDWIDTH LORENTZ-FORCE MAGNETOMETER BASED ON LATERAL OVERTONE BULK ACOUSTIC RESONATOR”

https://www.mems21.org/