SMALL group have 3 papers accepted for IEEE MEMS 2021!
SMALL group Luo ZF, Cai JX, Shao Shuai et al have following 3 papers accepted and to be present in IEEE MEMS 2021. Congratulations !
1. “OPTIMIZATION OF AlN AND AlScN FILM ICP ETCHING”
2. “INCREASING RANGING ACCURACY OF ALUMINUM NITRIDE PMUTS BY CIRCUIT COUPLING”
3. “WIDE BANDWIDTH LORENTZ-FORCE MAGNETOMETER BASED ON LATERAL OVERTONE BULK ACOUSTIC RESONATOR”
