Dr. Tao Wu 吴涛

Associate Professor, Principal Investigator

wutao @@ shanghaitech.edu.cn       SIST Building 3-326

Dr. Tao Wu has received the B.S. degree from the Zhejiang University China in 2007 (with honors), and earned his M.S. and Ph.D degrees from University of California, Los Angeles in 2009 and 2011, respectively. After graduation, he worked as a Process TD Engineer in Intel Corp. (Hillsboro, OR), focusing on high quality metal and low temperature oxide deposition using Atomic Layer Deposition (ALD).  From 2014/08 to 2015/06, he was a Post-Doctoral Researcher in Prof. Roger T. Howe’s group, Stanford University and leading a Google ATAP funded monocentric imager project. After that, he worked as a Post-Doctoral Researcher in Northeastern University leading a DARPA funded Nero-Zero sensor project using novel AlN resonator/switching technique for ultra-low power receiver application. Since July 2017, he is with the School of Information Science and Technology, ShanghaiTech University, China, as an Associate Professor, and PI of Shanghaitech Microsystem And noveL transducers Laboratory (SMALL) .

Dr. Wu has published more than 100 papers on international conferences and journals, including Nature Microsystems & Nanoengineering, ACS Nano, Applied Physics Letter, Journal of Applied Physics, Physical Review Letter, with a H-index of 30+ (Google Scholar).

Currently, the research scope of SMALL covers novel piezoelectric hibrid transducer and microsystem, Micro-/Nano-Electro-Mechanical system, advanced semiconductor processing and AI4MEMS, AI4IC.

SMALL welcome all level people with science and engineering background to join his lab to explore fascinating micro/nano-technologies.

Education

2008.9- 2011.12 Ph.D.   Mechanical Engineering, University of California, Los Angeles (USA)  

  • Major: Micro-Electro-Mechanical-System (MEMS) / Nanotechnology
  • Dissertation: Magnetoelectric Effect and Application in Layered Bulk Laminates, Thin Films and Nanostructures

2007.9-2008.9 M.S.   Mechanical Engineering, University of California, Los Angeles (USA)  

  • Dissertation: Characterization of Dielectric Charging and Reliability of Liquid-Metal Switches Using EWOD Actuation

2003.9-2007.6 B.S. Electrical Engineering, Zhejiang University (China)

  • Major: Electronics & Information Engineering (withhonors)
  • Minor: Advanced Honors Class of Engineering Education (ACEE), Chu Kechen Honors College
Research and Work Experience

2024.2- present Associate Professor, School of Information Science and Technology, ShanghaiTech University

2017.7- 2024.2 Assistant Professor, School of Information Science and Technology, ShanghaiTech University

  • Research Area: MEMS, Multiferroic/Piezoelectric Transducers, Advanced Nanofabrication

2015.10- 2017.6 Postdoctoral Research Fellow at Northeastern University (Co-PIs: Nicol McGruer and Matteo Rinaldi)

  • DARPA funded Near-Zero Power RF and Sensor Operations projects by developing a novel piezoelectric transformer, reso-switch, threshold switch and infrared sensors

2015.7- 2015.10 Device Development Engineer at Perosphere Inc. (Manager: Stefan Zappe and Sasha Bakhru)

  • Consulting and Process Development of batching medical chips for clinical trial of anticoagulant reversal agent
  • KOH batch etch process on both sides of doped silicon wafer and anodic bonding with glass substrate

2014.8- 2015.6 Postdoctoral Research Fellow at Stanford University (Co-PIs: Roger T. Howe and Olav Solgaard)

  • Google ATAP funded monocentric imager program: meet milestones within 10 months; Presented in Transducers 2015
  • Designed and demonstrated a CMOS compatible tessellated and curved monocentric imager using recessed negative trench profile and ALD Al2O3 sidewall passivation technique

2012.1- 2014.9 Process TD Engineer at Intel Corporation

  • 22/14nm technology nodes Atomic Layer Deposition (ALD) module owner and process development for high quality spacer and gate materials on different SOC processes
  • In charge of D1C 14nm ALD gate metal deposition process development and technology transfer; supervised engineers and technicians on new module processes and process flow; accomplished multiple yield and defect improvement projects

2011.3- 2012.1 Aneeve Nanotechnologies LLC, part-time intern (Manager: Kos Galatsis)                                                       

  • Carbon Nanotube (CNT) based electronic components for Unmanned Aircraft Systems (UAS)
  • Design, fabricate & test CNT based RF transistor devices and circuits; successfully acquired phase II funding

2008.9- 2012.1 Active Materials Laboratory, UCLA (Advisor: Gregory P. Carman)

  • Discovered giant strain hysteresis on (011) PMN-PT single crystal materials; developed multiple novel thin film and nanostructure multiferroic devices;
  • DARPA supported Non-Volatile Magnonic Logic project, developed spin wave logic devices with magnetoelectric elements to create a new computational logic system

2007.9- 2008.9 Micro and Nano Manufacturing Laboratory, UCLA (Advisor: Chang-Jin Kim)

  • Characterization and Modeling of Dielectric charging on Liquid-Metal Switch; develop a process of SU-8 2100 with super-hydrophobic Teflon coating and an automated measurement setup using Agilent B1500A semiconductor analyzer

2006.10-2007.1 State Key Laboratory of Power Electronics, Zhejiang University (Advisor: Zhaoming Qian)

  • Novel two-stage Low-Frequency Square-Wave Electronic Ballast circuit for MHD lamp
  • Solved a voltage regulation problem and built an inverter circuit for MHD lamp ignition

2006.7- 2006.9 ZJU-UCLA Summer Research (CSST) Program and continuing Bachelor thesis

  • Electroweting-on-dielectric (EWOD) Control Board Hardware/Software Design and Testing
  • Developed a multi-channel, high voltage (up to 1000V) PCB circuit using Microchip® PIC18F8722 and Supertex® ICs