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SMALL 招收2021级研究生、 博士后/研究员、访问学生/学者 Multiple openings of

Dr. Wu and collaborators have published a paper in Microsystems & Nanoengineering!

Dr. Wu and collaborators have published one paper in Mi

Dr. Wu and collaborators have published a paper in Journal of Physical Chemistry !

Dr. Wu and collaborators have published one paper in Jo

微纳工艺实验2020春季班结束!

《压电微机电谐振器》一书正式出版!

由吴涛和李昕欣老师共同翻译的《压电微机电谐振器》一书正式出版! 本书主要介绍压电MEMS谐振器的各种制作材料、

Dr. Wu and collaborators have published a paper in IEEE ELECTRON DEVICE LETTERS!

Dr. Wu and collaborators have published one paper in IE

Dr. Wu and collaborators have published a paper in JMEMS !

Dr. Wu and collaborators Ming-Huang Li and Songbin Gong

Congratulation! Dr. Wu is awarded for Shanghai Natural Science Foundation Program 2019 !

Dr. Tao Wu and Dr. Xiong Wang have collaborated to get

Prof. Wu leads a new Undergraduate Course Reform Project funded by Shanghai Municipal Education Commission

经学校申报、专家评审和市教委审核,上海科技大学吴涛老师负责申报的《微纳加工与微机电系统的教学与实践》项目,获得

Welcome 4 new members in SMALL !

Dr. YADAGIRI KARAMPURI joined SMALL in 2019/03. He earn

Dr. Wu and collaborators have presented 3 papers on IEEE MEMS 2019!

(a)芯片级微机电回转器结构图(b)回转器的高阶模态仿真 我校信息学院吴涛教授与UIUC Songbin Go

Dr. Wu and collaborators have published a review paper in MRS Bulletin!

图. (a-e)薄膜椭圆中多种能量的影响(f-g)利用特定切向的PMN-PT实现的磁畴控制(h)利用两组电极实

Congratulation! Dr. Wu is awarded for NSFC 2018 !

Dr. Tao Wu and Dr. Xiong Wang have collaborated to get

Prof. Wu has finished visiting UIUC ILIRM Group

Congratulation! Dr. Wu is awarded for Pujiang Talent Program 2018!

近日,经专家评审、见面会考评等程序,2018年度上海市浦江人才计划A、B类项目,最终共有150人成功入选,获得

Dr. Wu is visiting UIUC ILIRM Group

Dr. Wu is visiting UIUC Prof. Songbin Gong’s Illi

2 Papers accepted for presentation at IEEE MEMS 2018 Conference

The 2 papers have been accepted for presentation at IEE

We present our work in 2017 IEEE SENSORS Conference!

Dr. Tao Wu attended and present work titled “Desi

Aluminum Nitride RF MEMS

Aluminum Nitride (AlN) piezoelectric nano-plate NEMS re

Tessellated Silicon-Structures for Monocentric Imagers

Compared with conventional planar optical image sensors