Aluminum Nitride RF MEMS

Aluminum Nitride (AlN) piezoelectric nano-plate NEMS resonant devices that can address some of the most important challenges in the areas of physical, chemical and biological detection and can be simultaneously used to synthesize high-Q reconfigurable and adaptive radio frequency (RF) resonant devices. By taking advantage of the extraordinary transduction properties of AlN combined with the unique physical, optical and electrical properties of advanced materials such as graphene, photonic metamaterials, phase change materials and magnetic materials, we have been able to implement multiple and advanced sensing and RF communication functionalities in a small footprint.