SMALL

The Shanghaitech Microsystem And non-Linear transducers Laboratory (SMALL) is established in Fall 2017 associated with the School of Information Science and Technology at ShanghaiTech University by Principle Investigator Dr. Tao Wu.

At SMALL, we are developing miniature sensor and actuator systems made using advanced materials and micro/nano-fabrication processes. Research in this area is motivated by the potential to produce high-performance, low-cost, miniature sensors and actuators. Specific research areas of interest include Micro-/Nano-Electro-Mechanical System (M/NEMS) design and modeling, nanometer-scale data storage, novel multiferroic materials, processing and transducers, as well as their applications in smart hardware, renewable energy systems, Internet-Of-Things (IOT) etc. The researches at SMALL are, in particular, interdisciplinary, which incorporates the expertise from many engineering and scientific disciplinarians. We welcomes all science and engineering background to join this lab to explore fascinating micro/nano-technologies.

上科大微系统与先进传感器实验室(SMALL)由吴涛博士于2017年秋建立,隶属于上科大信息科学与技术学院。本实验室致力于利用先进传感材料研发微纳机电系统与器件,科研方向包括微多铁态材料在多维尺度下的耦合现象与机理,纳机电系统设计与建模,微纳尺度磁电存储器、传感器以及先进微纳加工工艺。微纳机电系统的研究涉及多学科交叉,我们欢迎各理工科相关专业背景的同学和科研人员加入。

  • Recent News

    • 2 Papers accepted for presentation at IEEE MEMS 2018 Conference

      The 2 papers have been accepted for presentation at IEEE MEMS 2018 Conference to be held in Belfast, Northern Ireland, UK on 21-25 January 2018.
      1. Tao Wu, Zhenyun Qian, and Matteo Rinaldi, “LOW COST THIN FILM ENCAPSULATION FOR ALN RESONATORS”
      2. Guofeng Chen, Cristian Cassella, Tao Wu, and Matteo Rinaldi, “Single-Chip Multi-Frequency Wideband Filters Based on Aluminum Nitride Cross-Sectional Lame Mode Resonators with Thick and Apodized Electrodes”

      Congratulations!

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    • Openings Available

      There are multiple openings of 1) graduate students (PhD or master), 2) postdoctoral fellow or research associate, 3) research engineer/assistant, 4) visiting student/internship in SMALL. Candidates with electronic/electrical engineering, mechanical engineering, physics and materials science related background and strong interests in MEMS and advanced transducers are welcome for the application. The researches at SMALL are, in particular, interdisciplinary, which incorporates the expertise from many engineering and scientific disciplinarians. We welcomes all people with science and engineering background to join SMALL to explore fascinating micro/nano-technologies. Competitive salary/subsidy will be provided.

      上海科技大学微系统与先进材料实验室现招收以下职位人员:1. 研究生(博士优先), 2. 博士后和助理研究员(有博后或类似科研经历),3. 科研工程师\助理(拥有硕士学位,动手能力强),4. 实习/访问学生。实验室研究方向涉及多学科交叉, 申请人需具有电子, 机械, 物理, 材料等相关学习工作背景, 对微纳加工和微纳传感器方向感兴趣。学校、学院和实验室将提供有竞争力的学生津贴/工作薪酬。

      Interested people please send your CV, Transcript and Personal Statement to Dr. Wu, and apply from here

      科研工程师\助理 请从官方申请 Research Engineer/Assistant

      博士后和助理研究员(有博后或类似科研经历)请从官方申请 Post-Doc / Research Associate

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    • We present our work in 2017 IEEE SENSORS Conference!

      Dr. Tao Wu attended and present work titled “Design and Fabrication of AlN RF MEMS Switch For Near-Zero Power RF Wake-Up Receivers” on 2017 IEEE SENSORS Conference held in Glasgow, Scotland, Oct. 30 – Nov. 1, 2017.

      We describe an AlN-based resonant switch (resoswitch) for use in a Near-Zero (NZero) RF Wake-up receiver. A folded beam structure compensates for the curvature
      caused by the stress gradient in sputtered AlN and ensures that the free end of center actuation beam is level with the side anchor beams. A 80.13 kHz resoswitch with Q over 4000 and an actuation gap of approximately 600 nm turns on when a -7 dBm, 800MHz signal square wave modulated at 80.13 kHz is applied to the actuator. This AlN electrostatic resoswitch enables integration of a high gain RF piezoelectric transformer with a high-Q electrostatic resoswitch for an ultra-low power RF receiver.

      Paper link: Sensors2017_Final

       

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    • Aluminum Nitride RF MEMS

      Aluminum Nitride (AlN) piezoelectric nano-plate NEMS resonant devices that can address some of the most important challenges in the areas of physical, chemical and biological detection and can be simultaneously used to synthesize high-Q reconfigurable and adaptive radio frequency (RF) resonant devices. By taking advantage of the extraordinary transduction properties of AlN combined with the unique physical, optical and electrical properties of advanced materials such as graphene, photonic metamaterials, phase change materials and magnetic materials, we have been able to implement multiple and advanced sensing and RF communication functionalities in a small footprint.

       

       

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    • Tessellated Silicon-Structures for Monocentric Imagers

      Compared with conventional planar optical image sensors, a curved focal plane array can simplify the lens design and improve the field of view. In this paper, we introduce the design and implementation of a segmented, hemispherical, CMOS-compatible silicon image plane for a 10-mm diameter spherical monocentric lens. To conform to the hemispherical focal plane of the lens, we use flexible gores that consist of arrays of spring-connected silicon hexagons. Mechanical functionality is demonstrated by assembling the 20-μm-thick silicon gores into a hemispherical test fixture. We have also fabricated and tested a photodiode array on a siliconon-insulator substrate for use with the curved imager. Optical testing shows that the fabricated photodiodes achieve good performance; the hemispherical imager enables a compact 160 ° field of view camera with 480% fill factor using a single spherical lens.

      This work has been selected as Featured Article in Nature Microsystems & Nanoengineering.

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